Corning® EAGLE XG® delivers dimensional stability and exceptionally clean, smooth, flat surfaces. The Alkaline earth boro-alum nosilicate composition includes no added heavy metals reducing the environmental impact of manufacturing. It also features exceptional thinness, helping to completely avoid the potential environmental and health hazards associated with pane thinning.
Coresix produces Eagle XG® wafers to all SEMI Standards including dimensional, flat and notch specifications. In addition, we offer custom specifications designed to your unique needs including alignment marks, holes, pockets edge profile, thickness flatness surface quality, cleanliness or any other details critical to your application.
Electrical Properties
| Property | Value |
|---|---|
| Log₁₀ Volume Resistivity at 250°C - 12.9 | ohm-cm |
| Log₁₀ Volume Resistivity at 500°C - 8.8 | ohm-cm |
| Dielectric Constant (20°C, 1kHz) | 6.17 |
| Loss Tangent (20°C, 1kHz) | 0.15% |
Thermal Properties
| Property | Value |
|---|---|
| Thermal Expansion (0-300°C) | 31.7 x 10⁻⁷ /°C |
| Thermal Expansion Room Temp | 35.5 x 10⁻⁷ /°C |
| To Settling Point | (25 - 675°C) |
Thermal Conductivity
| Temp (°C) | Specific Heat (J/g·K) | Thermal Diffusivity (cm²/sec) | Thermal Conductivity (W/cm·K) |
|---|---|---|---|
| 23 | 0.768 | 0.00601 | 0.0109 |
| 100 | 0.896 | 0.00572 | 0.0122 |
| 200 | 0.998 | 0.00546 | 0.0129 |
| 300 | 1.067 | 0.00530 | 0.0134 |
| 400 | 1.110 | 0.00522 | 0.0137 |
| 500 | 1.154 | 0.00518 | 0.0142 |
Mechanical Properties
| Property | Value |
|---|---|
| Density (20°C) | 2.38 g/cc |
| Young's Modulus | 73.6 GPa |
| Shear Modulus | 30.1 GPa |
| Poisson's Ratio | 0.23 |
| Vickers Hardness (200gm load, 25 sec dwell) | 640 |
Optical Properties
| Optical Wavelength | Refractive Index |
|---|---|
| 435.8 nm | 1.5198 |
| 467.8 nm | 1.5169 |
| 480 nm | 1.5160 |
| 508.6 nm | 1.5141 |
| 546.1 nm | 1.5119 |
| 589.3 nm | 1.5099 |
| 643.8 nm | 1.5078 |